AFM Photovoltaic Couches minces Hillocks Terres rares GENOMIQUE Silicon nanoclusters Phase transition XRD HR STEM-HAADF Atom probe tomography Structural properties Raman scattering Microstructure Citric acid Sputtering Oxide interface Pulvérisation cathodique Feature erasure CO adsorption Liposomes Rare-earth Silicium Microstructure physics CoMoS Silicon nitride Magnetron sputtering Electroluminescence Grazing incidence X-ray diffraction Conductivity ADE-FDTD IR spectroscopy Matériaux hybrides Nanostructured materials Silicon nanocrystals Luminescence Nanostructuring Pulvérisation magnétron radiofréquence Epitaxy Electron paramagnetic resonance Computational electromagnetic methods Oxides Al2O3 Optical amplifiers Rare earths Silicon photonics MoS2 High-k dielectrics Crystal structure Cerium Infrared absorption Nanostructure Reactive magnetron sputtering Raman Films Oxygen vacancies Guide d'onde FTIR Photoluminescence Semiconductors Energy transfer Resistive Switching Waveguides Silicon Rare earth SiC Waveguide RF magnetron sputtering Terbium Friction Multilayers Rare-earth- doped materials Microstructure physique Si-rich silicon oxide Oxide materials Refractive index PZT Radiofrequency magnetron sputtering Thin films Hafnium silicates Nanoparticles Couches minces semi-conductrices Nanostructures Si nanocluster Cathodoluminescence Rare-earth ions Neodymium Laser pyrolysis Irradiation Hafnium silicate Down-conversion Nanoparticules Quantum-well Rare-earth-doped materials Fluorescence Lifetime Thin film M-lines Erbium Doping